• Laser & Optoelectronics Progress
  • Vol. 58, Issue 23, 2326002 (2021)
Mengnan Xu1、2, Zengxiong Lu1、2、***, Yuejing Qi1、2、**, Jing Li1、2、*, and Jing Ma1
Author Affiliations
  • 1Institute of Microelectronics of Chinese Academy of Sciences, Beijing 100029, China
  • 2University of Chinese Academy of Sciences, Beijing 100094, China
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    DOI: 10.3788/LOP202259.2326002 Cite this Article Set citation alerts
    Mengnan Xu, Zengxiong Lu, Yuejing Qi, Jing Li, Jing Ma. Influence of Beam Polarization on Contrast of Self-Referencing Interference Signal[J]. Laser & Optoelectronics Progress, 2021, 58(23): 2326002 Copy Citation Text show less
    Optical path of the phase grating position measurement system. (a) Optical path of the phase grating position measurement system; (b) top view of prism P1; (c) side view of prism P2
    Fig. 1. Optical path of the phase grating position measurement system. (a) Optical path of the phase grating position measurement system; (b) top view of prism P1; (c) side view of prism P2
    Schematic diagram of light vector relationship between two adjacent reflecting surfaces in space
    Fig. 2. Schematic diagram of light vector relationship between two adjacent reflecting surfaces in space
    Interference signals at different positions of the phase grating (simulation experiment). (a) Δy=-8 μm & 0 μm; (b) Δy=-7.2 μm &-0.8 μm; (c) Δy=-6.4 μm & -1.6 μm; (d) Δy=-5.6 μm & -2.4 μm; (e) Δy=-4.8 μm & -3.2 μm; (f) Δy=-4 μm
    Fig. 3. Interference signals at different positions of the phase grating (simulation experiment). (a) Δy=-8 μm & 0 μm; (b) Δy=-7.2 μm &-0.8 μm; (c) Δy=-6.4 μm & -1.6 μm; (d) Δy=-5.6 μm & -2.4 μm; (e) Δy=-4.8 μm & -3.2 μm; (f) Δy=-4 μm
    Normalized interference signal on detector D under ideal conditions
    Fig. 4. Normalized interference signal on detector D under ideal conditions
    Influence of S0 extinction ratio on the interference signal contrast and peak intensity. (a) Signal contrast; (b) peak intensity
    Fig. 5. Influence of S0 extinction ratio on the interference signal contrast and peak intensity. (a) Signal contrast; (b) peak intensity
    Influence of PBS extinction ratio on interference signal contrast and peak intensity. (a) Signal contrast; (b) peak intensity
    Fig. 6. Influence of PBS extinction ratio on interference signal contrast and peak intensity. (a) Signal contrast; (b) peak intensity
    Influence of the polarization state of the incident light on the contrast of the interference signal. (a) Relationship between the ellipticity and ellipse angle of the incident light and the contrast of the interference signal; (b) partial enlargement
    Fig. 7. Influence of the polarization state of the incident light on the contrast of the interference signal. (a) Relationship between the ellipticity and ellipse angle of the incident light and the contrast of the interference signal; (b) partial enlargement
    Relationship between the contrast of the interference signal and the phase difference
    Fig. 8. Relationship between the contrast of the interference signal and the phase difference
    Polarization value range of incident light with interference signal contrast greater than 0.98 under different optical path differences
    Fig. 9. Polarization value range of incident light with interference signal contrast greater than 0.98 under different optical path differences
    GS0GS12GS21GS13GS22GS14GS23
    121-11112-1-11-101-100-110
    Table 1. Rotation matrix between the reflective surfaces in prisms P1 and P2
    Serial numberPolarization state of incident lightOptical path differenceExtinction ratioInterference signal contrast
    ψ /radtan εOPD /nmτS0τPBSVeV
    10.7854001000100011
    20.7854101000100000
    30.71560.4020993990.43870.4303
    42.3560.6330993990.57350.5830
    50.69970.1015.38100010000.90710.9045
    60.83300.095.12100010000.98740.9875
    70.77590.095.12100010000.99230.9924
    Table 2. Contrast of interference signal between simulation experiment and theoretical model under different parameters
    Mengnan Xu, Zengxiong Lu, Yuejing Qi, Jing Li, Jing Ma. Influence of Beam Polarization on Contrast of Self-Referencing Interference Signal[J]. Laser & Optoelectronics Progress, 2021, 58(23): 2326002
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