• Journal of Infrared and Millimeter Waves
  • Vol. 32, Issue 3, 193 (2013)
ZHONG Ying-Hui1, WANG Xian-Tai2, SU Yong-Bo2, CAO Yu-Xiong2, ZHANG Yu-Ming1, LIU Xin-Yu2, and JIN Zhi2
Author Affiliations
  • 1[in Chinese]
  • 2[in Chinese]
  • show less
    DOI: 10.3724/sp.j.1010.2013.00193 Cite this Article
    ZHONG Ying-Hui, WANG Xian-Tai, SU Yong-Bo, CAO Yu-Xiong, ZHANG Yu-Ming, LIU Xin-Yu, JIN Zhi. High performance InP-based In0.52Al0.48As/In0.53Ga0.47As HEMTs with extrinsic transconductance of 1052 mS/mm[J]. Journal of Infrared and Millimeter Waves, 2013, 32(3): 193 Copy Citation Text show less

    Abstract

    0.15 μm gate-length InP-based In0.52Al0.48As/In0.53Ga0.47As high electron mobility transistors (HEMTs) were successfully fabricated with gate-width of 2×50 μm and source-drain space of 2 μm. The maximum extrinsic transconductance (gmext) of 1 052 mS/mm was obtained under gate-source voltage (VGS) of 0.1 V and drain-source voltage (VDS) of 1.7 V at room temperature. Transmission Line Method (TLM) measurements revealed the contact resistance of 0.032 Ω·mm and the specific contact resistivity of 1.03×10-7 Ω·cm-2 on linear TLM patterns. Thus, markedly enhanced gmext was achieved by the superb Ohmic contact and the short source-drain space for minimizing series source resistance. These devices also demonstrated excellent RF characteristics. The fT and fmax extrapolated using the S-parameters measured from 100 MHz to 40 GHz were 151 GHz and 303 GHz, respectively. The HEMTs were promising for millimeter-wave band integrated circuits.
    ZHONG Ying-Hui, WANG Xian-Tai, SU Yong-Bo, CAO Yu-Xiong, ZHANG Yu-Ming, LIU Xin-Yu, JIN Zhi. High performance InP-based In0.52Al0.48As/In0.53Ga0.47As HEMTs with extrinsic transconductance of 1052 mS/mm[J]. Journal of Infrared and Millimeter Waves, 2013, 32(3): 193
    Download Citation