Xin Meng, Hongjun Wang, Dasen Wang, Ailing Tian, Bingcai Liu, Xueliang Zhu, Weiguo Liu. Application of TIE and Angular Spectrum Iteration to Scratch Depth Detection on the Surface of Optical Elements[J]. Acta Optica Sinica, 2023, 43(14): 1412002
- Acta Optica Sinica
- Vol. 43, Issue 14, 1412002 (2023)
Fig. 1. Schematic of scattering method
Fig. 2. Flow chart of angular spectrum iterative algorithm
Fig. 3. Flow chart of TIE algorithm
Fig. 4. Scratch distribution on the surface of optical components. (a) Transverse cross-section distribution; (b) three-dimensional distribution; (c) longitudinal cross-section distribution
Fig. 5. Scattered light field distribution of different types of scratches. (a) Square scratch; (b) triangular scratch; (c) oval scratch
Fig. 6. Reconstruction results of angular spectrum iterative algorithm. (a) Transverse cross-section distribution; (b) three-dimensional distribution; (c) longitudinal cross-section distribution
Fig. 7. Reconstruction results of TIE+angular spectrum iterative algorithm. (a) Transverse cross-section distribution; (b) three-dimensional distribution; (c) longitudinal cross-section distribution
Fig. 8. Intensity error curves of different types of scratches. (a) Square scratch; (b) triangular scratch; (c) oval scratch
Fig. 9. Scratch scattered light field distribution acquisition optical path
Fig. 10. Detection result of white light interferometry
Fig. 11. Scattering distribution of scratches. (a) Scattering distribution; (b) scattering distribution after pretreatment
Fig. 12. Scratch depth reconstruction results of two algorithms. (a) Transverse cross-section distribution; (b) three-dimensional distribution; (c) longitudinal cross-section distribution
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Table 1. Iterations when strength error is fixed
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Table 2. Calculation results of correlation coefficient
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Table 3. Calculation results of relative root mean square error
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Table 4. Reconstruction results of scratches with different depths by angular spectrum iterative algorithm
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Table 5. Reconstruction results of scratches with different depths by TIE+angular spectrum iterative algorithm
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Table 6. Calculation results of relative error of two reconstruction algorithms
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