Xiaoliu Li, Hua Shen, Jia Li, Xueyan Zhu, Dechao Yao, Qing Lu, Rihong Zhu. Optical Path Difference Calibration Method of Optical Fiber Array Point Source Generator in Tilted-Wave-Interferometer[J]. Acta Optica Sinica, 2018, 38(5): 0512002
- Acta Optica Sinica
- Vol. 38, Issue 5, 0512002 (2018)
Fig. 1. TWI system based on point source array
Fig. 2. Schematic of point source generator structure
Fig. 3. Schematic of point source generator structure based on fiber array
Fig. 4. Influence of optical path difference between output light beams on detection result
Fig. 5. Schematic of phase difference detection system
Fig. 6. Diagram of experimental setup
Fig. 7. Light path schematic for measurement of parabolic mirror using ZYGO interferometer
Fig. 8. (a) Surface deviation result of measurement of parabolic mirror using TWI system; (b) surface deviation result of measurement of parabolic mirror using ZYGO interferometer
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Table 1. Fiber measurement data at (-1,1) in fiber array
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Table 2. Optical path difference of each beam in point source generator with fiber array relative to reference beam
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