Weihong Zhu, Yang Wang, Lihao Wang, Yichen Liu, Zhenyu Wu. Research progress of reliability of MEMS fast steering mirror for satellite laser communication[J]. Infrared and Laser Engineering, 2023, 52(9): 20230179
- Infrared and Laser Engineering
- Vol. 52, Issue 9, 20230179 (2023)
![(a) Perspective; (b) Assembly drawing of piezoelectric ceramic FSM[22]](/richHtml/irla/2023/52/9/20230179/img_1.jpg)
Fig. 1. (a) Perspective; (b) Assembly drawing of piezoelectric ceramic FSM[22]
![(a) Electrostatically driven MEMS FSM structure; (b) Experimental setup[32]](/richHtml/irla/2023/52/9/20230179/img_2.jpg)
Fig. 2. (a) Electrostatically driven MEMS FSM structure; (b) Experimental setup[32]
![(a) Electromagnetically driven MEMS FSM structure; (b) Experimental setup[35]](/Images/icon/loading.gif){kind=icon}
Fig. 3. (a) Electromagnetically driven MEMS FSM structure; (b) Experimental setup[35]
Fig. 4. Piezoelectric MEMS FSM manufactured by SIMIT. (a) MEMS FSM; (b) Packaged MEMS FSM
Fig. 5. Piezoelectric MEMS FSM manufactured by SIMIT. (a) 14.34 grms random vibration; (b) 500 g shock simulation
Fig. 6. 1 mm metal bonding interface made by FIB[48]
Fig. 7. A scratch-induced bonding interface defect imaged by (a) C-SAM, confocal scanning acoustic microscope; (b) InGaAs camera with diascopic illumination; (c) InGaAs camera with episcopic illumination; (d) IR laser confocal microscope
Fig. 8. Z-stopper in bottom wafer[51]
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Table 1. Typical performance parameters and features of FSM
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Table 2. Common failure mechanisms and AFs of FSM
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