• Opto-Electronic Engineering
  • Vol. 35, Issue 9, 55 (2008)
DU Yan-li1、* and YAN Hui-min2
Author Affiliations
  • 1[in Chinese]
  • 2[in Chinese]
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    DOI: Cite this Article
    DU Yan-li, YAN Hui-min. Thickness Measurement of Ultra-thin Metallic Foil with Tandem Differential White Light Interferometry[J]. Opto-Electronic Engineering, 2008, 35(9): 55 Copy Citation Text show less
    References

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    [3] Hayashi Y,Ogawa S,Cho H,et al.Non-contaet Estimation of Thickness and Elastic Properties of Metallic Foils by The Wavelet Transform of Laser-generated Lamb Waves[J].NDT&E International,1999,32:21-27

    [4] Takahashi K,Nohira H,Hirose K,et al.Accurate determination of SiO2 film thickness by x-ray photoelectron spectroscopy[J].Appl.Phys.Lett,2003,83(16):3422-3424

    [5] Barrea R A,Bengio S,Derosa P A,et al.Absolute mass thickness determination of thin samples by X-ray fluorescence analysis[J].Nucl.Instr.and Meth.in Phys.Res.B,1998,143(4):561-568

    [6] Roper F.A High-frequency Eddy Current Method for The Thickness Measurement of Thin Metallic Foils Using Ferrite-core Transmission Systems[J].NDT&E international,2000,33(3):163-172

    [7] Matthew J Banet,Martin Fuchs.High-precision film thickness determination using a laser-based ultrasonic technique[J].Appl.Phys.Lett,1998,73(2):169-171

    [8] Kim G H,Kim S W.White light Scanning Interferometry for Thickness Measurement of Thin Film Layers[J].SPIE,1999,3783:239-246

    [10] Costantino Santiago,Martinez Oscar E.Wide Band Interferometry for Thickness Measurement[J].Optics Express,2003,11(8):952-957

    [11] Rao Y J,Jackson D A.Recent Progress in Fiber Optic Low-coherence Interferometry[J].Meas.Sci.Technol,1996,7(7):981-999

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    DU Yan-li, YAN Hui-min. Thickness Measurement of Ultra-thin Metallic Foil with Tandem Differential White Light Interferometry[J]. Opto-Electronic Engineering, 2008, 35(9): 55
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