• Chinese Journal of Lasers
  • Vol. 48, Issue 24, 2404002 (2021)
Ziming Dong1、2、3、*, Yanan Zhang1, Zhigang Liu2、3、**, Xiang Jiao2、3, Jianqiang Zhu2、3, Wenhui Cui2、3, and Weiheng Lin2、3
Author Affiliations
  • 1School of Mechatronic Engineering and Automation, Shanghai University, Shanghai 200444, China
  • 2National Laboratory on High Power Laser and Physics, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China
  • 3National Laboratory on High Power Laser and Physics, China Academy of Engineering Physics, Chinese Academy of Sciences, Shanghai 201800, China
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    DOI: 10.3788/CJL202148.2404002 Cite this Article Set citation alerts
    Ziming Dong, Yanan Zhang, Zhigang Liu, Xiang Jiao, Jianqiang Zhu, Wenhui Cui, Weiheng Lin. Eccentric Dual-Rotor Polishing and the Suppression of Mid-Spatial-Frequency Error: Technological Study[J]. Chinese Journal of Lasers, 2021, 48(24): 2404002 Copy Citation Text show less
    References

    [1] Lin Z Q. Progress of laser fusion (invited paper)[J]. Chinese Journal of Lasers, 37, 2202-2207(2010).

    [2] Yuan J L, Zhang F H, Dai Y F et al. Development research of science and technologies in ultra-precision machining field[J]. Journal of Mechanical Engineering, 46, 161-177(2010).

    [3] Fan C, Lu Y, Wang K J et al. Surface removal characteristic of computer-controlled dual-rotor polishing[J]. The International Journal of Advanced Manufacturing Technology, 111, 2189-2199(2020).

    [4] Wan S L, Wei C Y, Hong Z et al. Modeling and analysis of the mid-spatial- frequency error characteristics and generation mechanism in sub-aperture optical polishing[J]. Optics Express, 28, 8959-8973(2020).

    [5] Wang S, Liu J, Zhang L. Dual-rotor tool path generation and removal error analysis in active feed polishing[J]. Applied Optics, 52, 6948-6955(2013).

    [6] Jiang X W, Long X W, Tan Z Q. A review of material removal mechanism in ultra-precision polishing of optical glass[J]. Chinese Journal of Lasers, 48, 0401014(2021).

    [7] Li A M. Study on the removal characteristics and technology of computer-controlled gadget polishing[D](2003).

    [8] Wang Z Y, Zhang L X, Sun P F et al. Mathematical modeling method for generation of Gaussian-type removal function in fluid jet polishing[J]. Acta Optica Sinica, 38, 1022002(2018).

    [9] Aikens D M, Wolfe C R, Lawson J K. Use of power spectral density (PSD) functions in specifying optics for the National Ignition Facility[J]. Proceedings of SPIE, 2576, 281-292(1995).

    [10] Walker D, Brooks D, King A et al. The ‘precessions’ tooling for polishing and figuring flat, spherical and aspheric surfaces[J]. Optics Express, 11, 958-964(2003).

    [11] Shang W J. Model building and simulation of computer control deterministic grinding and polishing[D](2005).

    [12] Zhang W B. Theoretical research of the removal function based on the computer controlled polishing technology[D](2014).

    [13] Chen H N, Wang J L, Li X L et al. Modelling and approximation of Gaussian-like removal function in dual-rotor polishing technology of optics elements[J]. Acta Photonica Sinica, 42, 282-287(2013).

    [14] Yao Y S, Ma Z, Xu L et al. Removal functions of different polishing heads worked in planet motion model[J]. Optics and Precision Engineering, 25, 2706-2713(2017).

    [15] Chen X, Guo P J, Ren J F. Optimization of removal function in computer controlled optical surfacing[J]. Proceedings of SPIE, 7655, 76551Y(2010).

    [16] Dai Y F, Shang W J, Zhou X S. Effection of the material of a small tool to the removal function in computer control optical polishing[J]. Journal of National University of Defense Technology, 28, 97-101(2006).

    [17] Tang W L, Liang S J, Jiao X et al. Formation and control of scratches on surfaces of optical components during polishing[J]. Chinese Journal of Lasers, 46, 1202009(2019).

    [18] Liu B X, Jiao X, Tan X H et al. Effect of anionic modified polishing agent on Nd-doped phosphate laser glass polishing[J]. Chinese Journal of Lasers, 47, 1003001(2020).

    [19] Chen X. Optimizing analysis of removal function in computer controlled optical surfacing[D](2011).

    [20] Liu M M, Hong Y. Removal function of small tool polish based on ellipse motion[J]. Laser Technology, 38, 406-410(2014).

    [21] Lai L W, Liu Z G, Jiao X et al. Suppression of mid-spatial-frequency errors in optical elements by polishing with compound swing multi-link mechanism[J]. Chinese Journal of Lasers, 46, 1102001(2019).

    [22] Jia J P, He X Q, Jin Y J. Statistics[M]. 7th ed(2018).

    [23] Zhou X S. Study on techniques in computer-controlled grinding and polishing for large and medium aspheric surfaces[D](2007).

    Ziming Dong, Yanan Zhang, Zhigang Liu, Xiang Jiao, Jianqiang Zhu, Wenhui Cui, Weiheng Lin. Eccentric Dual-Rotor Polishing and the Suppression of Mid-Spatial-Frequency Error: Technological Study[J]. Chinese Journal of Lasers, 2021, 48(24): 2404002
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