Pengfei Wu, Xiaoxiao Han, Sichen Lei, Zhenkun Tan, Shuai Huang. Horizontal Coupling Technology of Thick Planar Optical Waveguide with High Refractive Index and Fiber[J]. Acta Optica Sinica, 2022, 42(7): 0713001
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- Acta Optica Sinica
- Vol. 42, Issue 7, 0713001 (2022)
Fig. 1. Schematic diagram of designed coupler. (a) Three-dimensional structure; (b) top view; (c) side view
Fig. 2. Coupling loss caused by port mode field mismatch when three ports of Si3N4 waveguide are directly coupled to fiber. (a) Port coupling loss varying with Wd under different Wt1; (b) mode field distribution diagrams of three-port branch port when Wt1=80 nm, Wd=0.7 μm
Fig. 3. Port coupling loss of fiber and SU-8 tapered structure varying with Ws1
Fig. 4. Factors affecting transmission loss of coupler. (a) Effect of output width Ws2 of SU-8 structure on transmission loss of coupler under different Wd; (b) mode field distribution diagrams of three-port branch port when Wt1=180 nm,Wd=0.57 μm; (c) effect of thickness Ht2 of SiO2 substrate under three-port branch waveguide on transmission loss of coupler under different output thicknesses Hs2 of SU-8 structure; (d) effect of branch length Lt1 on transmission loss of coupler; (e) effective refractive indexes of different modes under different Si3N4 waveguide widths; (f) effect of output taper length Lt2 on transmission loss of coupler; (g) effect of Ls1 of SU-8 structure on transmission loss of coupler
Fig. 5. Overall coupling performance analysis. (a) Horizontal alignment tolerance of coupler; (b) vertical alignment tolerance of coupler; (c) effect of mode field diameter on coupling loss; (b) effect of wavelength on coupling loss
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