1Ningbo Institute of Materials Technology and Engineering, Chinese Academy of Sciences, Ningbo 315201, China
2University of Chinese Academy of Sciences, Beijing 100049, China
3College of Physics Science & Technology, Laboratory of Optoelectronic Materials and Detection Technology, Guangxi Key Laboratory for the Relativistic Astrophysics, Guangxi University, Nanning 530004, China
4Advanced Micro-Fabrication Equipment Inc., Shanghai 201201, China
5Zhe Jiang Bright Semiconductor Technology Co., Ltd., Jinhua 321026, China
6Advanced Semiconductor Laboratory, King Abdullah University of Science and Technology (KAUST), Thuwal 23955, Saudi Arabia