• Acta Optica Sinica
  • Vol. 15, Issue 7, 917 (1995)
[in Chinese]1 and [in Chinese]2
Author Affiliations
  • 1[in Chinese]
  • 2[in Chinese]
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    [in Chinese], [in Chinese]. Scanning Tunneling Microscope Using a Momolithic Parallel Spring[J]. Acta Optica Sinica, 1995, 15(7): 917 Copy Citation Text show less

    Abstract

    This paper describes a novel scanning tunnling microscope (STM) system usinga two-dimensional monolithic Paranel spring (MPS) and piczo-electric actuators (PZT)for precision two-dimensional positioning. This leads the interference between the x-axisdisplacement and the y-axis to be very small. The PZT used for controlling the z-axisdisplacement and the sample-to-tip distance is mounted on the monolithic parallel spring.Therefore, the mutual interference to z-axis displacements is negligible.
    [in Chinese], [in Chinese]. Scanning Tunneling Microscope Using a Momolithic Parallel Spring[J]. Acta Optica Sinica, 1995, 15(7): 917
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