Wideband large dispersion group delay chip based on silicon photonics integration (Invited)

Hongwei Chen; Zhenmin Du; Tingzhao Fu; Sigang Yang; Minghua Chen

doi:10.3788/IRLA20211045

Journals >Infrared and Laser Engineering >Volume 50 >Issue 7 >Page 20211045 > Article

Infrared and Laser Engineering
Vol. 50, Issue 7, 20211045 (2021)

Wideband large dispersion group delay chip based on silicon photonics integration (Invited)

Hongwei Chen^1、2, Zhenmin Du^1、2, Tingzhao Fu^1、2, Sigang Yang^1、2, and Minghua Chen^1、2

Author Affiliations

¹Department of Electronic Engineering, Tsinghua University, Beijing 100084, China

²Beijing National Research Center for Information Science and Technology, Beijing 100084, China

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DOI: 10.3788/IRLA20211045 Cite this Article

Hongwei Chen, Zhenmin Du, Tingzhao Fu, Sigang Yang, Minghua Chen. Wideband large dispersion group delay chip based on silicon photonics integration (Invited)[J]. Infrared and Laser Engineering, 2021, 50(7): 20211045 Copy Citation Text

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Loss analysis of waveguide and the influence of Δneff on grating performance. (a) Loss analysis coordinate system; (b) Loss changes with aspect ratio and bending radius of the waveguide; (c) Grating overall loss and neff1 change with w1; (d) Grating reflectivity and GDR change with w1

Fig. 1. Loss analysis of waveguide and the influence of Δneff on grating performance. (a) Loss analysis coordinate system; (b) Loss changes with aspect ratio and bending radius of the waveguide; (c) Grating overall loss and neff₁ change with w₁; (d) Grating reflectivity and GDR change with w₁

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Fig. 2. Silicon integrated chirp Bragg grating chip. (a) Micrograph; (b) SEM of waveguide; (c) SEM of spiral grating

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Fig. 3. Chirped Bragg grating response and the apodized chirped Bragg grating response obtained in the experiment. (a) Chirped Bragg grating response with length of 23.4 cm; (b) Apodized chirped Bragg grating response with length of 23.4 cm; (c) Chirped Bragg grating response with length of 13.8 cm; (d) Apodized chirped Bragg grating response with length of 13.8 cm

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Ref.	Group	Group delay /ps	Tunability /ps	Bandwidth /nm	Size /mm²	Delay bandwidth product/ps·nm	Delay bandwidth product per unit area /ps·nm·mm⁻²	Material	Technology
[12]	K.J.Vahala	68000	N/A	Wideband	9025	-	-	Silicon	Path select
[13]	S.S.Patel	2560	Tunable	0.2	1200	512	0.43	SiO₂
[14]	D.J.Blumenthal	12350	850	>40	3825	>494000	129.15	Silicon Nitride
[15]	T.Baba	54	Tunable	3	16.48	162	9.83	Silicon	Slow light
[16]	R.T.Chen	216.7	Tunable	25	0.18	5417.5	30097	Silicon	Slow light
[17]	D.V.Plant	96	Tunable	8	0.015	768	61200	Silicon	Bragg grating
[18]	K.petermann	450	Tunable	1.2	>100	540	<0.54	Silicon	Bragg grating
[19]	J P.Chen	110	10	0.08	~1	8.8	~8.8	Silicon	Micro-ring
[20]	Andrea Melloni	800	100	0.08	~1	64	~64	Silicon Oxynitride	Micro-ring
-	H.W.Chen(this work)	2440	N/A	9.4	9.07	22936	2528	Silicon Nitride	Bragg grating

Table 1. Performance comparison of different schemes to realize group delay

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