Influence of supercooling on the thickness uniformity of HgCdTe film grown by LPE

LU Jun; LI Dong-Sheng; WU Jun; WAN Zhi-Yuan; SONG Lin-Wei; LI Pei; ZHANG Yang; KONG Jin-Cheng

doi:10.11972/j.issn.1001-9014.2019.02.007

[1] Wang H, Hong J, Yue F Y, et al. Optical homogeneity analysis of Hg1-x Cdx Te epitaxial layers: How to circumvent the influence of impurity absorption bands?［J］. Infrared Physics & Technology. 2017, 82: 1-7.

[2] Ahluwalia G K, Patro R. Infrared detectors［M］. Springer International Publishing, 2017.

[3] Lutz H, Breiter R, Figgemeier H, et al. Improved high operating temperature MCT MWIR modules［C］. Infrared Technology and Applications XL. International Society for Optics and Photonics, 2014:90701D.

[4] Breiter R, Benecke M, Eich D, et al. MCT SWIR modules for passive and active imaging applications［C］. SPIE Defense + Security. 2016:981908.

[5] Kinch M A. The Future of infrared; III-Vs or HgCdTe?［J］. J. Electronic Materials. 2015, 44(9): 1-8.

[6] Wang X, Li Q, Zhou S M, et al. Study of dark current for LWIR HgCdTe detectors with a graded doped junction［J］. Infrared Physics & Technology, 2018, 92: 358-362.

[7] Boulade O, Gravrand O, Cervera C, et al. Development activities on NIR large format MCT detectors for astrophysics and space science at CEA and SOFRADIR［C］. High Energy, Optical, and Infrared Detectors for Astronomy VII, 2016:99150C.

[9] Zhang W K, Lin J M, Chen H L, et al. Analysis injection area-dark current characteristics for mid-wavelength HgCdTe photodiodes［J］. Infrared Physics & Technology, 2018, 93: 70-76.

[12] Mouzali S, Lefebvre S, Rommeluère S, et al. Estimation of thickness and cadmium composition distributions in HgCdTe focal plane arrays［J］. J. Electronic Materials. 2016, 45(9): 4607-4611.

[13] Mouzali S, Lefebvre S, Rommeluère S, et al. Optical-based spectral modeling of infrared focal plane arrays［J］. Infrared Physics & Technology. 2016, 77: 351-359.

[14] LIU Ling-Feng, CHEN Yi-Yu, YE Zhen-Hua, et al. A review on plasma-etch-process induced damage of HgCdTe［J］. Infrared Physics & Technology, 2018, 90: 175-185.

[16] Gravrand O, Destefanis G, Bisotto S, et al. Issues in HgCdTe research and expected progress in infrared detector fabrication［J］. J. Electronic Materials. 2013, 42(11): 3349-3358.

[17] Johnson S M, Rhiger D R, Radford W A. Historical perspectives on HgCdTe material and device development at Raytheon Vision Systems［J］. Proc. of SPIE,2009: Vol. 7298.

[19] Pelliciari B. State of the art of LPE HgCdTe at LIR［J］. Journal of Crystal Growth. 1988, 86(1-4): 146-160.

[21] Shapiro C, Huff E, Smith R. Intra-pixel response characterization of a HgCdTe near infrared detector with a pronounced crosshatch pattern［J］. Instrumentation & Methods for Astrophysics, 2018: 122.