[5] N. Metchkarov, V. Sainov, P. Boone. High-accuracy surface measurement using laser-diode phase-stepping interferometry [J]. Vacuum, 2000, 58(2):464~469
[5] N. Metchkarov, V. Sainov, P. Boone. High-accuracy surface measurement using laser-diode phase-stepping interferometry [J]. Vacuum, 2000, 58(2):464~469
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