[1] SUGISAKI Katsumi, OSHINO Tetsuya. Assembly and alignment of three aspherical mirror optics for extreme ultraviolet projection lithography [J]. SPIE, 2000, 3998: 751-758.

[3] BOLTON J F. A Technique For The Optical Analysis Of Deformed Telescope Mirrors[J]. SPIE, 1986, 628: 684-688.

[6] LUC Arnold. Optimized Axial Suppor Topologies For Thin Telescope Mirrors[J]. Optical Engineering, 1995, 34(2): 67-73.