ZHENG Xing, LIU Zi-Ji, GU De-En, GOU Jun, MA Jia-Feng, LI Wei-Zhi, WU Zhi-Ming. AOrthogonal design of multilayer thin film residual stress impact on the THz micro bridge deformation[J]. Journal of Infrared and Millimeter Waves, 2016, 35(3): 326
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