[1] S. Cristoloveanu. Introduction to silicon on insulator materials and devices[J]. Microelectronic Engineering,1997,39(1-4):145-154

[2] P. K. Vasudev. CMOS device and interconnect technology enhancements for low power/low voltage applications[J]. Solid-State Electronics,1996,39(4):481-488

[3] S. Pae,T. Su. Multiple layers of silicon-on-insulator islands fabrication by selective epitaxial growth[J]. IEEE Electron Device Lett.,1999,20(5):194-196

[4] S. Tsao,H. Guo,C. Ko. 1×2 and 2×2 SOI switch applying in optical communication network[J]. Acta Optica Sinica,2003,23(S):783-784

[5] J. Du,W. H. Ko,D. J. Young. Single crystal silicon MEMS fabrication based on smartcut technique[J]. Sensors and Actuators A,2004,112(1):116-121

[6] W. Mokwa. Advanced sensors and microsystems on SOI[J]. International Journal of High Speed Electronics and Systems,2000,10(1):147-153

[7] Jiang Xiaoqing,Li Baiyang,Tang Yanzhe et al.. Design and fabrication of the star coupler based on SOI material[J]. Chin. Opt. Lett.,2003,1(8):465-467

[8] Jia Xiaoling,Gao Fan,Zhang Feng. Design and optimization of a new type 3×3 Silicon-on-insulator multimode interference optical switch[J]. Acta Optica Sinica,2005,25(9):1208-1213

[9] Zhiyong Li,Jinzhong Yu,Shaowu Chen et al.. Paired interference 3 dB coupler based on SOI rib waveguides with anisotropic chemical wet etching[J]. Chin. Opt. Lett.,2007,5(4):215-217

[10] Weidong Gao,Meiqiong Zhan,Jianda Shao et al.. Laser-induced damage of single-crystalline silicon under different 1064 nm Nd:YAG laser modes[C]. SPIE,2005,5627:286-290

[11] Yuan Yonghua,Liu Songhao,Sun Chengwei et al.. Study of surface ripple on laser-induced Si/ Ge material[J]. Chinese J. Lasers,2004,31(3):273-276

[12] Li Yuhua,Ma Fajun,Dai Nengli et al.. Ultra-short pulsed laser-induced damage in inorganic silicon materials[J]. Chinese J. Lasers,2007,34(7):1009-1013

[13] Liu Guodong,Wang Guibing,Li Jianfeng et al.. Ultrafast carrier dynamics in surface of silicon-on-insulator[J]. Acta Optica Sinica,2009,29(3):752-755

[15] Sun Chengwei,Lu qisheng,Fan zhengxiu et al.. Effects of Laser Irradiation[M]. Beijing:National Defense Industry Press,2002

[16] Wang Xucheng,Shao Min. The Basic Theory and Numerical Method of the Finite Element[M]. Beijing:Qinghua University press,1977

[17] M. Kruer,R. Allen,L. Esterowitz et al.. Laser damage in silicon photodiodes[J]. Opt. Quant. Electron.,1976,8(5):453-458

[18] Ding Yanfang. Studies of new SOI materials and relevant technologies & applications[D]. Shanghai:East China Normal University,2007. 20-21