Error Analysis of the New Measurement Technique for Obtaining the Spectral Diffraction Efficiencies of a Grating

[1] Bonod N, Neauport J. Advances in Optics and Photonics, 2016, 8(1): 156.

[3] Rasmussen T. Spectroscopy, 2014, 29(4): 32.

[4] Rumpel M, Moeller M, Moormann C, et al. Optics Letters, 2014, 39(2): 323.

[5] Schrter T J, Koch F J, Meyer P, et al. Review of Scientific Instruments, 2017, 88(2): 029901.

[6] Yang L, Zeng L, Li L. Applied Optics, 2014, 53(6): 1143.

[7] He K, Wang J, Hou Y, et al. Applied Optics, 2013, 52(4): 653.

[8] Yang L. Proc. SPIE, Modeling Aspects in Optical Metrology V, 2015, 952606.

[9] Yin L, Bayanheshig, Yang J, et al. Applied Optics, 2016, 55(13): 3574.

[10] Hannibal M M, Hansen P E. Surface Topography Metrology & Properties, 2016, 4(2): 023003.

[11] Calaon M, Madsen M H, Weirich J, et al. Surface Topography Metrology & Properties, 2015, 3(4): 045005.

[12] Maas J, Ebert M, Bhattacharyya K, et al. Proc. SPIE, 27th European Mask and Lithography Conference, 2011, 79850H.

[13] Madsen M H, Hansen P-E, Zalkovskij M, et al. Optica, 2015, 2(4): 301.

[14] Piao M, Cui Q, Zhu H, et al. Journal of Optics, 2014, 16(3): 035707.

[15] Wang S, Liu S, Shao J, et al. Review of Scientific Instruments, 2018, 89(7): 073102.

[16] Zhang C G, Wang H, Zhang Z H, et al. Optics Letters, 2018, 43(9): 2126.