Bing Ran, Dizhi Zhao, Lianghua Wen. Research on Dynamic Stress of Piezoelectric Fast Steering Mirror Stacked PZT Actuator[J]. Laser & Optoelectronics Progress, 2022, 59(5): 0523001
- Laser & Optoelectronics Progress
- Vol. 59, Issue 5, 0523001 (2022)
Fig. 1. Structure and
Fig. 2. Bending mode of stacked PZT actuator. (a) Tilting shape of 300 mm PFSM; (b) force and bending shape analysis of stacked PZT actuator; (c) microelement analysis of stacked PZT actuator
Fig. 3. Deformations and stresses of the actuator under different driving voltage amplitudes. (a) Amplitude is 50 V; (b) amplitude is 200 V; (c) amplitude is 350 V; (d) amplitude is 500 V
Fig. 4. Analyses of stresses of stacked PZT actuator under different driving voltage amplitudes
Fig. 5. Shapes and stresses PZT layer under different bending stiffnesses of PZT hinge. (a) Bending stiffness is 0.16 N·m2; (b) bending stiffness is 2.5 N·m2; (c) bending stiffness is 12.56 N·m2; (d) bending stiffness is 40.2 N·m2
Fig. 6. Analyses of stresses of stacked PZT actuator under different bending stiffnesses of PZT hinge
Fig. 7. Shapes and stresses PZT layer under different voltage frequencies. (a) Frequency is 60 Hz; (b) frequency is 120 Hz; (c) frequency is 180 Hz; (d) frequency is 250 Hz.
Fig. 8. Analyses of stresses of stacked PZT actuator under different voltage frequencies
Fig. 9. Distribution of actual value-predicted value and the probability distribution of internal studentized residuals. (a) Distribution of actual value-predicted value for CCD design; (b) probability distribution of internal studentized residuals for Von Miss stress
Fig. 10. （a） Contour map and （b） 3D response surface of Von Miss stress with BS and FR
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Table 1. Levels and codes of independent variables
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