• High Power Laser and Particle Beams
  • Vol. 34, Issue 3, 031018 (2022)
Bowen Fu1、2, Qinnan Zhang1、2, Yong Tian1, and Jindong Tian1、2、*
Author Affiliations
  • 1College of Physics and Optoelectronic Engineering, Shenzhen University, Shenzhen 518061, China
  • 2Research Institute of Laser Processing Technology and Intelligent Manufacturing, Shenzhen 518107, China
  • show less
    DOI: 10.11884/HPLPB202234.210271 Cite this Article
    Bowen Fu, Qinnan Zhang, Yong Tian, Jindong Tian. Analysis of thermal effect of high-power semiconductor laser spectral combining grating[J]. High Power Laser and Particle Beams, 2022, 34(3): 031018 Copy Citation Text show less
    Schematic diagram of laser structure
    Fig. 1. Schematic diagram of laser structure
    Periodic structure of diffraction grating
    Fig. 2. Periodic structure of diffraction grating
    The geometric model of the diffraction grating substrate
    Fig. 3. The geometric model of the diffraction grating substrate
    Flow chart of high-power semiconductor laser spectrum combining COMSOL implementation
    Fig. 4. Flow chart of high-power semiconductor laser spectrum combining COMSOL implementation
    Light thermal simulation results
    Fig. 5. Light thermal simulation results
    Stress and deformation nephogram at 10 min
    Fig. 6. Stress and deformation nephogram at 10 min
    Variation curves of stress and deformation at the center of diffraction grating with different thickness
    Fig. 7. Variation curves of stress and deformation at the center of diffraction grating with different thickness
    Grating surface deformation in each direction and −1 order diffraction efficiency variation curves
    Fig. 8. Grating surface deformation in each direction and −1 order diffraction efficiency variation curves
    Simulation results of beam angle and position offset
    Fig. 9. Simulation results of beam angle and position offset
    grating period d/nm microstructure height h/nm microstructure width w/nm air refractive index n0incident angle θ/(°)
    625.01725.0400.01.0θi(i=1,2,3,4,5)
    Table 1. Periodic boundary parameters of wire grid unit
    materialnκk/[W·(m·K)−1] ρ/kg·m−3Cp/[J·(kg·K)] α/K−1E/MPa μ
    quartz glass1.5082.89×10−81.3822037035.5×10−77.31×1040.17
    Y3Al5O121.81611.0645511582.76.94×10−62.86×1050.25
    Si(100)3.5797.49×10−4152.462330707.122.57×10−61.31×1050.28
    Table 2. Physical parameters of common diffraction grating substrate materials
    Bowen Fu, Qinnan Zhang, Yong Tian, Jindong Tian. Analysis of thermal effect of high-power semiconductor laser spectral combining grating[J]. High Power Laser and Particle Beams, 2022, 34(3): 031018
    Download Citation