Water-Assisted Laser Induced Plasma Backside Etching of Pyrex7740 Glass

Sun Shufeng; Shao Yong

doi:10.3788/lop54.101404

[1] Wang Weikang, Yuan Weizheng, Ren Sen, et al. Research on Pyrex7740 glass deep etching mask［J］. Transducer and Microsystem Technologies, 2014, 33(6): 15-18.

[2] Malhotra R, Saxena I, Ehmann K, et al. Laser-induced palsma micro-machining (LIPMM) for enhanced productivity and flexibility in laser-based micro-machining processes［J］. CIRP Annals-Manufacturing Technology, 2013, 62(1): 211-214.

[3] Zhang Jinwen, Yang Huabing, Jiang Wei, et al. Fabrication of via-hole on Pyrex7740 glass wafer by HF wet-etching technique［J］. Journal of Functional Materials and Devices, 2011, 17(6): 596-599.

[4] Ming Anjie, Li Tie, Liu Wenping, et al. Investgation on deep etching of Pyrex7740 glass［J］. Microfabrication Technology, 2007(1): 51-55.

[5] Xu Xiaoxin, Gao Xiang, Xu Jing, et al. Pyrex glass wet deep etching and surface wiring［J］. Journal of Functional Materials and Devices, 2007, 13(6): 566-571.

[6] Matsuo S, Sumi H, Kiyama S, et al. Femtosecond laser-assisted etching of Pyrex glass with aqueous solution of KOH［J］. Applied Surface Science, 2009, 255(24): 9758-9760.

[7] Pallav K, Saxena I, Ehmann K F, et al. Comparative assessment of the laser-induced plasma micromachining and the ultrashort pulsed laser ablation processes［J］. Journal of Micro and Nano-Manufacturing, 2014, 2(3): 031001.

[8] Hopp B, Vass C, Smausz T, et al. Laser induced backside dry etching of transparent materials［J］. Applied Surface Science, 2007, 253(19): 7922-7925.

[9] He F, Cheng Y, Xu Z Z, et al. Direct fabrication of homogeneous microfluidic channels embedded in fused silica using a femtosecond laser［J］. Optics Letters, 2010, 35(3): 282-284.

[10] Chen Jimin, He Chao, Zhou Weiping, et al. Fabrication of binary diffractive optical element by fiber laser induced backside dry etching［J］. Optics and Precision Engineering, 2012, 20(1): 31-37.

[11] Wang Can. A study on laser etching and polishing quartz glasses technology［D］. Wuhan: Huazhong University of Science and Technology, 2012.

[12] Bonse J, Wrobel J M, Krüger J, et al. Ultrashort-pulse laser ablation of indium phosphide in air［J］. Applied Physics A, 2001, 72(1): 89-94.

[13] Ehrhardt M, Raciukaitis G, Gecys P, et al. Laser-induced backside wet etching of fluoride and sapphire using picosecond laser pulses［J］. Applied Physics A, 2010, 101(2): 399-404.

[14] Guan Xueqiang. Research of microfluidic chip manufacturing method based on rapid prototype technology［D］. Tianjin: Hebei University of Technology, 2005.