Shan Mao, Jianlin Zhao. Optimal Design for Multi-Layer Diffractive Optical Elements with Antireflection Films[J]. Acta Optica Sinica, 2019, 39(3): 0305001
- Acta Optica Sinica
- Vol. 39, Issue 3, 0305001 (2019)
Fig. 1. Typical separate double-layer diffractive optical elements. (a) Optical microstructure; (b) light transmission path
Fig. 2. MLDOEs with antireflection films. (a) Physical structure of antireflection films; (b) optical microstructure
Fig. 3. Calculated diffraction efficiency of MLDOEs with traditional method. (a) Theoretical diffraction efficiency; (b) actual diffraction efficiency
Fig. 4. Relationship between incident angle and calculated PIDE of MLDOEs by traditional method
Fig. 5. Calculated diffraction efficiency of MLDOEs with antireflection coatings with traditional method
Fig. 6. Calculated diffraction efficiency of MLDOEs with optimal method. (a) Effect of incident wavelength on diffraction efficiency at continuous incident angles; (b) effect of incident wavelength on diffraction efficiency at two incident angles
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Table 1. Film system parameters of antireflection films for MLDOEs
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Table 2. Calculated heights of surface microstructure of MLDOEs
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Table 3. Calculated diffraction efficiency of MLDOEs with traditional method
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Table 4. Calculated diffraction efficiency of MLDOEs at some specific wavelengths with optimal method
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Table 5. PIDE of MLDOEs for two design methods
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