• Chinese Journal of Lasers
  • Vol. 29, Issue s1, 568 (2002)
ZHAO Xin1、2, YAO Jian-quan1, and LIANG Li-ping2
Author Affiliations
  • 1[in Chinese]
  • 2[in Chinese]
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    ZHAO Xin, YAO Jian-quan, LIANG Li-ping. Design for Optical System and Beam Control of Laser Trimmer[J]. Chinese Journal of Lasers, 2002, 29(s1): 568 Copy Citation Text show less

    Abstract

    The design for optical system of laser trimmer is mainly discussed. The effect of parameters and scanning manner of laser beam on the trimming is analysed in detail. In addition, according to the general needs of the machine, the accurate control of scanning galvanometer and laser source is presented.
    ZHAO Xin, YAO Jian-quan, LIANG Li-ping. Design for Optical System and Beam Control of Laser Trimmer[J]. Chinese Journal of Lasers, 2002, 29(s1): 568
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