[1] Ekinci T O, Mayer J R R, Cloutier G M. Investigation of accu-racy of aerostatic guideways[J]. International Journal of Ma-chine Tools and Manufacture, 2009, 49(6): 478–487.
[3] Zhang J H, Menq C H. A linear/angular interferometer capable of measuring large angular motion[J]. Measurement Science and Technology, 1999, 10(12): 1247–1253.
[4] Menq C H, Zhang J H, Shi J. Design and development of an interferometer with improved angular tolerance and its applica-tion to x–y theta measurement[J]. Review of Scientific Instru-ments, 2000, 71(12): 4633–4638.
[6] Kim J A, Bae EW, Kim S H, et al. Design methods for six-degree-of-freedom displacement measurement systems using cooperative targets[J]. Precision Engineering, 2002, 26(1): 99–104.
[8] Khodadad D, Singh A K, Pedrini G, et al. Full-field 3D deforma-tion measurement: comparison between speckle phase and displacement evaluation[J]. Applied Optics, 2016, 55(27): 7735–7743.
[11] Wu H, Zhang X M, Gan J Q, et al. High-precision displacement measurement method for three degrees of freedom-compliant mechanisms based on computer micro-vision[J]. Applied Op-tics, 2016, 55(10): 2594–2600.
[14] Kroll J J. Six degree of freedom optical sensor for dynamic measurement of linear axes[D]. Charlotte: University of North Carolina at Charlotte, 2003.
[15] Thomas B L, Bass H M, Loftus L K, et al. Laser aligned five-axis position measurement device: 5798828[P]. 1998-08-25.
[17] Hsieh H L, Pan S W. Three-degree-of-freedom displacement measurement using grating-based heterodyne interferometry[J]. Applied Optics, 2013, 52(27): 6840–6848.
[18] Kim JW, Kang C S, Kim J A, et al. A compact system for si-multaneous measurement of linear and angular displacements of nano-stages[J]. Optics Express, 2007, 15(24): 15759–15766.