ANTIREFLECTIVE AND PROTECTIVE FILMS PREPARATION ON ZnS DOME SONG Jian-Quan（College of Materials Science and

[in Chinese]; [in Chinese]; [in Chinese]; [in Chinese]; [in Chinese]

[1] Swec D M, Mirtich M J. Diamonlike carbon protective coatings for optical windows.Proc. SPIE,1989,1112: 162—173

[2] Mackowki J M, Cimma B, Pignard R,et al. Rain erosion behavior of germanium carbide (GeC) films grown on ZnS substrates.Proc. SPIE,1992,1760: 201—209

[4] LIU Zheng-Tang, ZHU Jing-Zhi, XU Nian-Kan,et al. Structure and properties of germanium carbide films prepared by RF reactive sputtering in Ar/Ch4. J.Appl.Phys.,1997,36(6A): 3625—3628

[5] Kelly C J,Orr J S, Gordon H,et al. Application of germanium carbide in durable multilayer IR coatings. Proc.SPIE,1990,1275: 122—133

[6] Gibson D R, Waddell E M, Wilson A D,et al. Ultradurable phosphide-based antireflection coatings for sand and rain erosion protection.Opt. Eng.,1994,33(3): 957—966

[7] Korenstein R, Goldman L, Hallock R,et al. Diamond coated ZnS for improved erosion resistance.Proc. SPIE,1997,3060: 181—195

[8] Seungbum H, Eunah K, Byeong S B,et al. A simulation model for thickness profile of the film deposited using planar circular type magnetron sputtering sources. J.Vac.Sci.Technol.,1996,A14(5): 2721—2727