• Journal of Infrared and Millimeter Waves
  • Vol. 35, Issue 4, 394 (2016)
YANG Jia1、2、*, JIN Xiang-Liang1、2, YANG Hong-Jiao1、2, TANG Li-Zhen1、2, and LIU Wei-Hui1、2
Author Affiliations
  • 1[in Chinese]
  • 2[in Chinese]
  • show less
    DOI: 10.11972/j.issn.1001-9014.2016.04.003 Cite this Article
    YANG Jia, JIN Xiang-Liang, YANG Hong-Jiao, TANG Li-Zhen, LIU Wei-Hui. Design and analysis of a novel low dark count rate SPAD[J]. Journal of Infrared and Millimeter Waves, 2016, 35(4): 394 Copy Citation Text show less

    Abstract

    A novel low dark count rate single-photon avalanche diode (SPAD) device was designed and fabricated with the 0.18 μm CMOS Image Sensor (CIS) technology in this paper. The device is comprised of an effective P+/LNW (light N-well doping) junction for photon detecting and a low concentration N-type diffusing circular guard-ring formed by the deep N-well diffusion. The latter prevents premature edge breakdown (PEB) of the junction and ensures it to operate in Geiger mode. The measured results show that the SPAD achieves a low dark count rate (DCR), and the DCR is 260 Hz at an excess bias voltage of 2V for 8 μm diameter active area structure at room temperature.
    YANG Jia, JIN Xiang-Liang, YANG Hong-Jiao, TANG Li-Zhen, LIU Wei-Hui. Design and analysis of a novel low dark count rate SPAD[J]. Journal of Infrared and Millimeter Waves, 2016, 35(4): 394
    Download Citation