Fast Partially Coherent Imaging Algorithm with Symmetric Illumination Source

SHI Zhaojun; GAO Yiqing

doi:10.3969/j.issn.1003-501x.2013.02.012

[1] Born M, Wolf E. Principle of Optics [M]. Pergamon Press Ltd, 2005.

[2] Hopkins H H. On the diffraction theroy of optical image [C]//Proceedings of the Royal Society of London Series A, 1953, 217: 408-432.

[3] Cobb N B. Fast optical and process proimity correction algorithms for integrated circuit manufacturing [D]. University of california-berkeley, 1998.

[4] Kenji Yamazoe. Computation theory of partially coherent imaging by stacked pupil shift matrix [J]. J.Opt.Soc.Am.A (S1084-7529), 2008, 25: 3111-3119.

[5] LIAN Yaogang, ZHOU Xin. Fast and accurate computation of partially coherent imaging by stacked pupil shift operator [EB/OL]. http://www.luminescenttechnologies.com/PressReleases/BACUS%202009%20Fast%20TCC%20Model.pdf.

[6] Manakli S, Trouiller Y, Schiavone P, et al. Optimization of the depth of focus based on the analysis of the diffraction orders in the pupil plane [J]. Microelectronic Engineering(S0167-9327), 2003, 67: 70-77.

[7] Alfred Kwok-kit Wong. Resolution Enhancement Techniques in Optical Lithography [M]. SPIE press, 2001.

[8] Heinrich Kirchauer. Photolithography Simulation[EB/OL]. http://www.iue.tuwien.ac.at/phd/kirchauer/diss.html, 1998.