• Chinese Optics Letters
  • Vol. 15, Issue 10, 101203 (2017)
Meng Zheng, Ke Liu, Lihui Liu, and Yanqiu Li*
Author Affiliations
  • Key Laboratory of Photoelectronic Imaging Technology and Systems, Ministry of Education of China, School of Optoelectronics, Beijing Institute of Technology, Beijing 100081, China
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    DOI: 10.3788/COL201715.101203 Cite this Article Set citation alerts
    Meng Zheng, Ke Liu, Lihui Liu, Yanqiu Li. Design of a grating by a joint optimization method for a phase-shifting point diffraction interferometer[J]. Chinese Optics Letters, 2017, 15(10): 101203 Copy Citation Text show less
    Schematic view of the PS/PDI.
    Fig. 1. Schematic view of the PS/PDI.
    Cr film transmittance versus thickness.
    Fig. 2. Cr film transmittance versus thickness.
    Single-slit diffraction.
    Fig. 3. Single-slit diffraction.
    Structure of the rectangular linear grating.
    Fig. 4. Structure of the rectangular linear grating.
    (Color online) Curve of the grating diffraction efficiency.
    Fig. 5. (Color online) Curve of the grating diffraction efficiency.
    Curve of the pinhole transmittance.
    Fig. 6. Curve of the pinhole transmittance.
    Curve of the interference fringe contrast.
    Fig. 7. Curve of the interference fringe contrast.
    PS/PDI structure of the homemade grating and interferograms. (a) A grabbed interferogram, (b) an interferogram of the removed background, (c) the homemade grating adopts the design method in this Letter, (d) an enlarged view of (b), and (e) a Zernike coefficient diagram of the measurement results.
    Fig. 8. PS/PDI structure of the homemade grating and interferograms. (a) A grabbed interferogram, (b) an interferogram of the removed background, (c) the homemade grating adopts the design method in this Letter, (d) an enlarged view of (b), and (e) a Zernike coefficient diagram of the measurement results.
    Grating Constant (μm)Duty CycleFilm Thickness (nm)Film Coating Materials
    1555%200Cr
    Table 1. Grating Design Parameters for PS/PDI
    Meng Zheng, Ke Liu, Lihui Liu, Yanqiu Li. Design of a grating by a joint optimization method for a phase-shifting point diffraction interferometer[J]. Chinese Optics Letters, 2017, 15(10): 101203
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