Morphology Measurement of Glass Micromachining Based on Digital Holography

Weixia LI; Sujuan HUANG; Cheng YAN

doi:10.3788/gzxb20215009.0912003

[1] D DORNFELD, S MIN, Y TAKEUCHI. Recent advances in mechanical micromachining. CIRP Annals, 55, 745-768(2006).

[2] K L WLODARCZYK, A BRUNTON, P RUMSBY et al. Picosecond laser cutting and drilling of thin flex glass. Optics and Lasers in Engineering, 78, 64-74(2016).

[3] S BISWAS, A KARTHIKEYAN, A M KIETZIG. Effect of repetition rate on femtosecond laser-induced homogenous microstructures. Materials, 9, 1023(2016).

[4] A I AGUILAR-MORALES, S ALAMRI, T KUNZE et al. Influence of processing parameters on surface texture homogeneity using direct laser interference patterning. Optics and Laser Technology, 107, 216-227(2018).

[5] B F JU, Y L CHEN, W ZHANG et al. Note： Long range and accurate measurement of deep trench microstructures by a specialized scanning tunneling microscope. Review of Scientific Instruments, 83, 103001(2012).

[6] F STOHR, J MICHAEL-LINDHARD, H SIMONS et al. Three-dimensional nanometrology of microstructures by replica molding and large-range atomic force microscopy. Microelectronic Engineering, 141, 6-11(2015).

[7] H J JORDAN, M WEGNER, H TIZIANI. Highly accurate non-contact characterization of engineering surfaces using confocal microscopy. Measurement Science and Technology, 9, 1142(1998).

[8] C O MAHONY, M HILL, M BRUNET et al. Characterization of micromechanical structures using white-light interferometry. Measurement Science and Technology, 14, 1807-1814(2003).

[9] Z XIE, T YAN, Z YI et al. Surface and thickness measurement of transparent thin-film layers utilizing modulation-based structured-illumination microscopy. Optics Express, 26, 2944(2018).

[10] K B SEO, B M KIM, E S KIM. Digital holographic microscopy based on a modified lateral shearing interferometer for three-dimensional visual inspection of nanoscale defects on transparent objects. Nanoscale Research Letters, 9, 471(2014).

[11] Z EL-SCHICH, A MÖLDER, H TASSIDIS et al. Induction of morphological changes in death-induced cancer cells monitored by holographic microscopy. Journal of Structural Biology, 189, 207-212(2015).

[12] F CHARRIÈRE, J KÜHN, T COLOMB et al. Characterization of microlenses by digital holographic microscopy. Applied Optics, 45, 829-835(2006).

[13] F MEROLA, L MICCIO, S COPPOLA et al. Exploring the capabilities of digital holography as tool for testing optical microstructures. 3D Research, 2, 1-8(2011).

[14] V R BESAGA, A V SAETCHNINOV, N C GERHARDT et al. Digital holographic microscopy for sub-µm scale high aspect ratio structures in transparent materials. Optics and Lasers in Engineering, 121, 441-447(2019).

[15] V ABBASIAN, E A AKHLAGHI, M A CHARSOOGHI et al. Digital holographic microscopy for 3D surface characterization of polymeric nanocomposites. Ultramicroscopy, 185, 72-80(2018).

[16] Yunxin WANG, Dayong WANG, Jie ZHAO等. 3D surface detection of micro-optical elements based on digital holographic microscopic imaging. Acta Optica Sinica, 31(2011).

[17] Lijun DENG, Yong YANG, Bingchuan SHI等. Low coherence off-axis digital holography based on scanning the optical path difference. Acta Photonica Sinica, 43, 1011001(2014).

[18] Zhu CHEN, Hongzhen JIANG, Xu LIU等. Measurement of surface defects of optical elements using digital holography. Optics and Precision Engineering, 25, 576-583(2017).

[19] Fang FENG, Ailing TIAN, Bingcai LIU等. Full-field three-dimensional test for scratch defects using digital holographic scanning imaging system. Chinese Journal of Lasers, 47(2020).

[20] L JI, Y HU, J LI et al. High-precision micro-through-hole array in quartz glass machined by infrared picosecond laser. Applied Physics A, 121, 1163-1169(2015).

[21] Songling XING, Lei LIU, Guisheng ZHOU等. Effects of femtosecond laser parameters on hole drilling of silica glass. Chinese Journal of Lasers, 42(2015).

[22] P LI, T JIN, H XIAO et al. Topographical characterization and wear behavior of diamond wheel at different processing stages in grinding of N-BK7 optical glass. Tribology International, 151, 106453(2020).

[23] Y LIN, S HUANG et al. Phase distribution analysis of tissues based on the off-axis digital holographic hybrid reconstruction algorithm. Biomedical Optics Express, 9, 1-13(2017).

[24] Jianping WANG, Zhengjia LI, Xiaohong FAN. Laser marking system and analysis of its technical parameters. Optics and Optoelectronic Technology, 3, 32-35(2005).