Weixia LI, Sujuan HUANG, Cheng YAN. Morphology Measurement of Glass Micromachining Based on Digital Holography[J]. Acta Photonica Sinica, 2021, 50(9): 0912003
- Acta Photonica Sinica
- Vol. 50, Issue 9, 0912003 (2021)
Fig. 1. Schematic diagram of experimental setup
Fig. 2. Morphology simulation of flat， convex microlen
Fig. 3. Morphology measurement of flat， convex microlen array
Fig. 4. Morphology distribution of linear microstructure under different laser power
Fig. 5. Lithography depth and maximum recondensed height of linear microstructure under different laser power
Fig. 6. Morphology distribution of linear microstructure under different marking speed
Fig. 7. Lithography depth and maximum recondensed height of linear microstructure under different marking speed
Fig. 8. Morphology distribution of linear microstructure under different Q frequency
Fig. 9. Lithography depth and maximum recondensed height of linear microstructure under different Q frequency
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Table 1. Depth of flat， convex microlen array
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