ZnO Thin Films Prepared by PECVD from Mixture Sources of Metalorganic Zinc and Carbon Dioxide-Hydrogen Gas

[in Chinese]; [in Chinese]; [in Chinese]; [in Chinese]; [in Chinese]; [in Chinese]; [in Chinese]

Journals >Acta Optica Sinica >Volume 26 >Issue 4 >Page 639 > Article

Acta Optica Sinica
Vol. 26, Issue 4, 639 (2006)

ZnO Thin Films Prepared by PECVD from Mixture Sources of Metalorganic Zinc and Carbon Dioxide-Hydrogen Gas

[in Chinese]^1、2、*, [in Chinese]¹, [in Chinese]¹, [in Chinese]², [in Chinese]², [in Chinese]³, and [in Chinese]¹

Author Affiliations

¹[in Chinese]

²[in Chinese]

³[in Chinese]

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[in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. ZnO Thin Films Prepared by PECVD from Mixture Sources of Metalorganic Zinc and Carbon Dioxide-Hydrogen Gas[J]. Acta Optica Sinica, 2006, 26(4): 639 Copy Citation Text

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