Yaoxuan FAN, Wenxi ZHANG, Zhou WU, Shuai YANG, Rikang QIN. Analysis and optimization of noise tolerance for interferometer instrument transfer function[J]. Optics and Precision Engineering, 2024, 32(11): 1653
- Optics and Precision Engineering
- Vol. 32, Issue 11, 1653 (2024)
Fig. 1. Schematic of illumination train and imaging train of Fizeau interferometer
Fig. 2. Distribution of phase step object through optical system
Fig. 3. ITF curves of ideal system， system with λ /4 defocus and disturbed by noise
Fig. 4. ITF curves with different ITFRMS values
Fig. 5. Measurement error-SNR curves
Fig. 6. ITFRMS-SNR curves
Fig. 7. ITFRMS-SNR curves using different sampling periods
Fig. 8. ITFRMS-SNR curves using different phase-shifting steps in ITF test
Fig. 9. ITFRMS-SNR curves of average results of repeated experiments
Fig. 10. Filter processing result
Fig. 11. ITFRMS -SNR curves after median filter
Fig. 12. Experiment and results
Fig. 13. Interferogram， phase recovery map， profile recovery map and step trace positon
Fig. 14. Step height and ITF curves obtained from experiment
Fig. 15. Experimental optimal results
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Table 1. Object-image relationship and transfer function of coherent image system
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