Near the damage threshold, the periodic surface structure on pure Cu, Ag and Au produced by femtosecond laser pulses of 60 fs at 1 kHz repetition with the central wavelength of 800 nm is observed by scanning electronic microscope （SEM）. With the number of laser pulses increasing, the structure is damaged obviously. The period of the structure depending on the incidence angle is studied, and it is found that the period of the three metals are almost the same when the incidence angle is small. The difference between each other is still infinitesimal when the incident angle is large. Different metals have different damage threshold, so it is believed that the incident laser energy density at small angle affects the periodic structures’ sharpness only. It was verified in terms of surface periodic structures theory (SPSs).