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Acta Optica Sinica
Vol. 44, Issue 21, 2112002 (2024)

Reconstruction Method of Wafer Map Based on Parametric Surface

Zhipeng Wu^1,2, Yuejing Qi^1,2,*, Dan Wang^1,2, Tianwei Xu¹, and Xin Zhou^1,2

Author Affiliations

¹Institute of Microelectronics of Chinese Academy of Sciences, Beijing 100029, China

²University of Chinese Academy of Sciences, Beijing 100049, China

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DOI: 10.3788/AOS241018 Cite this Article Set citation alerts

Zhipeng Wu, Yuejing Qi, Dan Wang, Tianwei Xu, Xin Zhou. Reconstruction Method of Wafer Map Based on Parametric Surface[J]. Acta Optica Sinica, 2024, 44(21): 2112002 Copy Citation Text

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References

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[9] Heertjes M F, Butler H, Dirkx N J et al. Control of wafer scanners: methods and developments[C], 3686-3703(2020).

[10] Li M, Zhu Y, Yang K M et al. Convergence rate oriented iterative feedback tuning with application to an ultraprecision wafer stage[J]. IEEE Transactions on Industrial Electronics, 66, 1993-2003(2019).

[11] Kuang Z A, Sun L T, Gao H J et al. Practical fractional-order variable-gain supertwisting control with application to wafer stages of photolithography systems[J]. IEEE/ASME Transactions on Mechatronics, 27, 214-224(2022).

[12] Wang J H, Yang Y X, Zhou Y G. Dynamic three-dimensional surface reconstruction approach for continuously deformed objects[J]. IEEE Photonics Journal, 13, 6800415(2021).

[13] Wang H R, Wu Z J, Zhang Q C et al. High-speed three-dimensional morphology measurement based on time multiplexing coding[J]. Acta Optica Sinica, 43, 0112003(2023).

[14] Wu Y, Zhu C G. Construction of triharmonic Bézier surfaces from boundary conditions[J]. Journal of Computational and Applied Mathematics, 377, 112906(2020).

[15] Shafieipour M, Aronsson J, Jeffrey I et al. On new triangle quadrature rules for the locally corrected nyström method formulated on NURBS-generated Bézier surfaces in 3-D[J]. IEEE Transactions on Antennas and Propagation, 64, 3027-3038(2016).

[16] Yu P Q, Shi X Q. G1 continuous conditions for bicubic NURBS surfaces[J]. Journal of Dalian University of Technology, 44, 330-333(2004).

[17] Rouhani M, Sappa A D, Boyer E. Implicit B-spline surface reconstruction[J]. IEEE Transactions on Image Processing, 24, 22-32(2015).

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Zhipeng Wu, Yuejing Qi, Dan Wang, Tianwei Xu, Xin Zhou. Reconstruction Method of Wafer Map Based on Parametric Surface[J]. Acta Optica Sinica, 2024, 44(21): 2112002

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