The main drawbacks of the spontaneous Raman scattering is its poor efficiency due to small Raman scattering cross sections and the interference with radiations from the laser when it is used to measurement actual combustion parameters. To overcome these drawbacks, XeF(C-A) laser is used as excited source in spontaneous Raman scattering research. Some parameters of the XeF(C-A) laser is optimized for adapt to the need of spontaneous Raman scattering. The experimental setup is built, which is used to measurement the mole fraction of components in the atmosphere. The advantages and disadvantages of spontaneous Raman scattering excited by different lasers are compared. The result shows that the XeF(C-A) laser with high energy, long pulse width and long wavelength is very fit to be used as spontaneous Raman scattering light source.