The drive mode of MEMS deformable micro-mirror is initially selected. Based on theoretical analysis of optics and mechanics characteristics of MEMS deformable micro-mirror, the relation between correlation structure parameter and performance of deformable mirror is obtained according to the requirements which compensate thermally induced aberration of laser diode. Pumped solid-state laser, a novel electrostatic actuated deformable micro-mirror with continuous facet is designed. It is used to set up a closed-loop control adaptive optics system, which has compensated thermally induced aberration of laser beam. The experimental result shows the intra-cavity aberration was effectively compensated and the output power and beam quality were improved by the novel MEMS deformable micro-mirror.