[1] P. M. Hagelin, U. Krishnamoorthy, J. P. Heritage, and O. Solgaard, IEEE Photon. Technol. Lett. 12, 882 (2000).

[2] W. Li, J. Liang, X. Li, Y. Zhong, Z. Liang, and D. Sun, Acta Opt. Sin. (in Chinese) 28, 1151 (2008).

[3] M. C. Wu, Proc. SPIE 5715, 1 (2005).

[4] D. Wang and S. Wei, Acta Opt. Sin. (in Chinese) 28, 51 (2008).

[5] M. A. Michalicek, N. Clark, and J. H. Comtois, Proc. SPIE 3353, 805 (1998).

[6] S. Waldis, F. Zamkotsian, P. A. Clerc, W. Noell, M. Zickar, and N. de Rooij, IEEE J. Sel. Top. Quantum Electron. 13, 168 (2007).

[7] A. Dubra, D. C. Gray, J. I. W. Morgan, and D. R. Williams, Proc. SPIE 6888, 688803 (2008).

[8] L. M. C. A. Thompson, M. W. K. Flath, S. C. Wilks, R. A. Young, G. W. Johnson, and A. J. Ruggiero, Proc. SPIE 4821, 129 (2002).

[9] J. Li, H. Q. Chen, G. P. Yan, Y. Liu, and P. Wu, Proc. SPIE 5985, 59851R (2005).

[10] J. Carter, A. Cowen, B. Hardy, R. Mahadevan, M. Stonefield, and S. Wilcenski, PolyMUMPs Design Handbook (Revision 11.0, MEMSCAP Inc., 2005).

[11] M. A. Rosa, D. D. Bruyker, A. R. Volkel, E. Peeters, and J. Dunec, J. Micromech. Microeng. 14, 446 (2004).

[12] J. Comtois, A. Michalicek, W. Cowan, and J. Butler, Sensors and Actuators A 78, 54 (1999).

[13] Q. Sun, M. Cai, N. Y. Wang, and E. Cretu, Proc. SPIE 7510, 751003 (2009).

[14] S. M. N. Rao, P. Pandojirao-Sunkojirao, N. Dhaubanjar, M. Chiao, and J. Chiao, Int. J. Optomechatron. 3, 149 (2009).