Contents
2010
Volume: 8 Issue 12
25 Article(s)

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Research Article
Optimization designed large-stroke MEMS micromirror for adaptive optics
Quan Sun, Kelly He, and Edmond Cretu
A novel micromirror based on the PolyMUMPs process is designed and presented. The hexagonal micromirror with a diameter of 450 μm consists of three supporting bilayer cantilevers and a mirror plate. The bilayer cantilevers, formed with a polysilicon layer and a gold layer, elevate the mirror plate according to residual
Chinese Optics Letters
  • Publication Date: Jul. 07, 2021
  • Vol. 8, Issue 12, 1163 (2010)