Gong Shuang, Yang Baoxi, Huang Huijie. Effects of Mid-Spatial Frequency Surface Errors on the Illumination Field Uniformity of Off-Axis Illumination[J]. Chinese Journal of Lasers, 2020, 47(12): 1204003
- Chinese Journal of Lasers
- Vol. 47, Issue 12, 1204003 (2020)
Fig. 1. Diagrams of illumination modes. (a) Circular; (b) annular; (c) dipole; (d) quadrupole
Fig. 2. Far field intensity distribution of DOE
Fig. 3. Wavefront in the exit pupil and its PSF. (a) Wavefront in the exit pupil under circular mode; (b) wavefront in the exit pupil under dipole mode; (c)PSF with MSF errors under circular mode; (d) PSF with MSF errors under dipole mode
Fig. 4. Distribution of LSF under dipole mode
Fig. 5. Encircled energy for the LSF. (a) σ=0.2; (b) σ=0.8
Fig. 6. Illustration of the effects of MSF surface errors on illumination field
Fig. 7. Uniformity of illumination field versus PV value under different coherence factors
Fig. 8. Penumbra width versus PV value under different coherence factors
Fig. 9. Structure of relay lens group in photolithography illumination
Fig. 10. Uniformity of illumination field created by simulation. (a) Ideal illumination field; (b) illumination field under the effects of MSF surface errors
Fig. 11. Uniformity of illumination field versus PV value under different coherence factors
Fig. 12. Diagram of the effects of MSF surface errors on penumbra width
Fig. 13. Penumbra width versus PV value under different coherence factors
Fig. 14. Structure of surface errors. (a) Actually manufactured surface errors; (b) low-spatial frequency surface errors; (c) mid-spatial frequency surface errors
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Table 1. Uniformity of illumination field under different PV values and coherence factors unit: %
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Table 2. Penumbra width under different PV and coherence factorsunit: mm
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Table 3. Uniformity of illumination field and penumbra width under different PV values and coherence factors
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