A new method for diamond nucleation on the mirror surface of nondiamond substrates using C 60 films as the intermediate layers is presented. The polycrystalline diamond films have been deposited on Si(100) mirror surface and on SiO 2 scratching surface without higher substrate negative bias pretreatment prior to diamond growth by microwave plasma chemical vapor deposition. The diamond grains of resulted films show cauliflower like small crystalline aggregates, and the morphologies of the grains show cauliflower-like small crystalline aggregates, and the morphologies of the grains show (100) faces in SEM images.