Axial and radial distributions of emission spectral intensities from XeCl excimer laser induced plasma near YBa2Cu3O7-xsuperconducting forget surface were measured by using an Optical Spectroscopy Analyzer (OSA). The ansular distributions of excited species in the plasma plume were obtained with curve sitting method on the assumption that each kind of excited species had corresponding uniform radiation probability over the plasma region respectively. The plasma plume exhibited a cos n θ spread and the value of n is between 2.78 and 7.63. The results were investigated as the functions of laser spot energy density and background oxygen pressure respectively.