Chalcogenide Glass Nonlinear Integrated Optical Waveguide Fabrication by Hot Melt Smoothing and Micro-trench Filling（Invited）

Renduo QI; Yanfen ZHAI; Wei ZHANG; Yidong HUANG

doi:10.3788/gzxb20225105.0551303

Journals >Acta Photonica Sinica >Volume 51 >Issue 5 >Page 0551303 > Article

Acta Photonica Sinica
Vol. 51, Issue 5, 0551303 (2022)

Chalcogenide Glass Nonlinear Integrated Optical Waveguide Fabrication by Hot Melt Smoothing and Micro-trench Filling（Invited）

Renduo QI¹, Yanfen ZHAI², Wei ZHANG^1、3、*, and Yidong HUANG^1、3

Author Affiliations

¹Beijing National Research Center for Information Science and Technology（BNRist），Beijing Innovation Center for Future Chips，Frontier Science Center for Quantum Information，Electronic Engineering Department，Tsinghua University，Beijing 100084，China

²Silicon Austria Labs GmbH，A 9524 Villach，Austria

³Beijing Academy of Quantum Information Sciences，Beijing 100193，China

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DOI: 10.3788/gzxb20225105.0551303 Cite this Article

Renduo QI, Yanfen ZHAI, Wei ZHANG, Yidong HUANG. Chalcogenide Glass Nonlinear Integrated Optical Waveguide Fabrication by Hot Melt Smoothing and Micro-trench Filling（Invited）[J]. Acta Photonica Sinica, 2022, 51(5): 0551303 Copy Citation Text

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Fig. 1. Integrated chalcogenide glass photonic devices fabricated by different methods

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Chalcogenide glass waveguides with low-index strips on the surface of As2S3 glass film［69］

Fig. 2. Chalcogenide glass waveguides with low-index strips on the surface of As₂S₃ glass film^［69］

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Fig. 3. Fabrication process of chalcogenide glass waveguides by hot melt smoothing and micro-trench filling

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Fig. 4. As₂S₇ waveguide and microring samples fabricated by hot melt smoothing and micro-trench filling method

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Fig. 5. Experimental measurement of the third order nonlinear coefficient of the chalcogenide glass waveguides^［13］

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Fig. 6. Experimental measurement of stimulated Brillouin scattering properties of chalcogenide glass waveguides^［13］

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Materials	n₂/（m²·W^-1）	γ/（/W·km^-1）	Loss/（dB·m^-1）	TPA/（m·W^-1）	FOM
High nonlinearity SiO₂fiber^［29］	3.2×10^-20	21	10^-3	-	大
As₂S₃ fiber^［30］	2×10^-18	160	0.88	6.2×10^-15	208
As₂Se₃ fiber^［31］	9×10^-16	1 200	1	2.5×10^-12	2.3
As₂S₃ ridge waveguide^［32］	2.9×10^-18	1 700	5	6.2×10^-15	304
Dispersion optimized As₂S₃ waveguide^［33］	3×10^-18	9 900	60	6.2×10^-15	312
Ge_11.5As₂₄Se_64.5 nanowire^［34］	9×10^-18	136 000	250	1×10^-13	60
Silicon nanowire waveguide^［35］	6×10^-18	150 000	400	5×10^-12	0.77

Table 1. Optical parameters of typical third-order nonlinear waveguides at telecom band^［4］

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Materials	Refractive index n	Velocity of longitudinal sound wave v_l/（m s^-1）	Brillouin gain coefficient g_B/（m W^-1）	Photoelastic coefficient p₁₂
SiO₂	1.45	5 960	4.52×10^-11	0.286
As₂S₃	2.45	2 500	0.74×10^-9	0.244
As₂Se₃	2.8	2 250	6×10^-9	0.266
CaF₂	1.429	6 600	2.8×10^-11
Si	3.5	8 900		-0.017

Table 2. Optical and elastic parameters of typical materials for photonic integration^［9］

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