Research on Fabrication of Micro-Optical Elements with ORMOSILS Thin Film

[in Chinese]; [in Chinese]; [in Chinese]

Journals >Opto-Electronic Engineering >Volume 29 >Issue 5 >Page 25 > Article

Opto-Electronic Engineering
Vol. 29, Issue 5, 25 (2002)

Research on Fabrication of Micro-Optical Elements with ORMOSILS Thin Film

[in Chinese], [in Chinese], and [in Chinese]

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[in Chinese]

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DOI: Cite this Article

[in Chinese], [in Chinese], [in Chinese]. Research on Fabrication of Micro-Optical Elements with ORMOSILS Thin Film[J]. Opto-Electronic Engineering, 2002, 29(5): 25 Copy Citation Text

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References

[3] Haruxy Y, Gilath I, Maniewictz M, et al. Refractive and Diffractive Micro-optical Elements and Arrays Prepared by the fast Sol-gel Processes [J]. SPIE, 1997, 3110 : 488-499.

[4] Cao Bing. Sol-gel derived self-supporting film[J]. Non-Cryst. Solids, 1999, 246(3): 34-38.

[7] van Bommel M J , Bernards T N M, et al. The influence of the addition of alkyl-substituted ethoxysilane on the hydrolysis-condensation process of TEOS [J]. Non-Cryst Solids, 1991, 128(5): 231-242.

[in Chinese], [in Chinese], [in Chinese]. Research on Fabrication of Micro-Optical Elements with ORMOSILS Thin Film[J]. Opto-Electronic Engineering, 2002, 29(5): 25

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