• Chinese Journal of Lasers
  • Vol. 14, Issue 4, 225 (1987)
Li Zhaolin, Zhang Zebo, Hong Xichun, Zhao Yuying, and Wang Tianjuan
Author Affiliations
  • [in Chinese]
  • show less
    DOI: Cite this Article Set citation alerts
    Li Zhaolin, Zhang Zebo, Hong Xichun, Zhao Yuying, Wang Tianjuan. Amorphous Si: H film grown by laser plasma induced chemical vapour deposition[J]. Chinese Journal of Lasers, 1987, 14(4): 225 Copy Citation Text show less

    Abstract

    Amorphous Si: H fillm has been obtained with a pulsed CO2 laser by laser plasma induced chemical vapour deposition (LPCVD). The experiment is described and the dependance of film growth rate on the related experimental parameters and the suitable depositing condition are given. Some properties of the film were measured and analyzed.
    Li Zhaolin, Zhang Zebo, Hong Xichun, Zhao Yuying, Wang Tianjuan. Amorphous Si: H film grown by laser plasma induced chemical vapour deposition[J]. Chinese Journal of Lasers, 1987, 14(4): 225
    Download Citation