Development and Optical Performance of Soft X-ray Multilayer Phase Laminar Grating

[in Chinese]; [in Chinese]; [in Chinese]; [in Chinese]; [in Chinese]; [in Chinese]; [in Chinese]; [in Chinese]; [in Chinese]

Journals >Acta Optica Sinica >Volume 14 >Issue 6 >Page 642 > Article

Acta Optica Sinica
Vol. 14, Issue 6, 642 (1994)

Development and Optical Performance of Soft X-ray Multilayer Phase Laminar Grating

[in Chinese]¹, [in Chinese]¹, [in Chinese]¹, [in Chinese]¹, [in Chinese]¹, [in Chinese]², [in Chinese]², [in Chinese]², and [in Chinese]³

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¹[in Chinese]

²[in Chinese]

³[in Chinese]

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[in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. Development and Optical Performance of Soft X-ray Multilayer Phase Laminar Grating[J]. Acta Optica Sinica, 1994, 14(6): 642 Copy Citation Text

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Abstract

The developement and characterization of soft X-ray multilayer phase laminargrating are given detailly. The optical performance was measured at Beijing SynchrotronRadiation Facility, the results are discussed and analysised.

Keywords

multilayer optical performance soft X-ray phase grating

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