A Confocal Method for Measuring Whole-Field Three-Dimentional Surface Topography

[in Chinese]; [in Chinese]; [in Chinese]; [in Chinese]; [in Chinese]

[1] C. J. R. Sheppard,(ed. by H. Ohzu, S. Komatsu). Progress in confocal microscopy and its application. The 3rd International Conference on Optics Within Life Sciences-OWLS Ⅲ, Publ. by Else vier Science B. V. in Amsterdam,1994: 91～94

[2] G. Q. Xiao, T. R. Corle, G. S. Kino. Real time confocal scanning optical microscope. Appl. Phys. Lett., 1988, 53(8): 716～718

[3] H. J. Tiziani, H. M. Uhde. Three-dimension alanalysis by a microlens-array confocal arrangement. Appl. Opt., 1994, 33(4): 567～572

[4] H. J. Tiziani, R. Achi, R. N. Kramen et al.. Theoretical analysis of confocal microscopy with microlenses. Appl. Opt., 1996, 35(1): 120～125

[6] W. J. Tian, J. W. Yang, Z. K. Bao et al.. New method for measuring the properties of optical systems with microoptic components. Proc. SPIE, 1996, 2899: 263～268

[7] C. J. R. Sheppard, H. J. Matthews. The extended-focus, auto-focus and surface-profiling techniques of confocal microscopy. J. Mod. Opt., 1988, 35(1): 145～154

[8] T. D. Doukoglou, I. W. Hunter. Spherical-coddinate scanning confocal laser microscope. Opt. Eng., 1995, 34(7): 2103～2108

[9] T. Wilson, A. R. Carlini. Size of the detector in confocal imaging systems. Opt. Lett., 1987, 12(4): 227～229

CLP Journals