Ion-beam sputtering deposition of oxide coatings

[in Chinese]; [in Chinese]; [in Chinese]

Journals >Acta Optica Sinica >Volume 12 >Issue 5 >Page 473 > Article

Acta Optica Sinica
Vol. 12, Issue 5, 473 (1992)

Ion-beam sputtering deposition of oxide coatings

[in Chinese], [in Chinese], and [in Chinese]

Author Affiliations

[in Chinese]

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[in Chinese], [in Chinese], [in Chinese]. Ion-beam sputtering deposition of oxide coatings[J]. Acta Optica Sinica, 1992, 12(5): 473 Copy Citation Text

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Abstract

TiO2 and ZrO2 thin films were deposited by ion-beam sputtering. Their refractive indices, optical absorption and laser-induced damage thresholds are investigated. The optical absorption of the coatings are decreased obviously.

Keywords

optical properties thin film ion beam sputtering deposition