Profilometer Based on Interferometry and Micro Vision System

WANG Hai-shan; SHI Tie-lin; LIAO Guang-lan; LIU Shi-yuan; ZHANG Wen-dong

Journals >Opto-Electronic Engineering >Volume 35 >Issue 7 >Page 84 > Article

Opto-Electronic Engineering
Vol. 35, Issue 7, 84 (2008)

Profilometer Based on Interferometry and Micro Vision System

WANG Hai-shan^1、2、*, SHI Tie-lin^1、2, LIAO Guang-lan^1、2, LIU Shi-yuan^1、2, and ZHANG Wen-dong³

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¹[in Chinese]

²[in Chinese]

³[in Chinese]

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WANG Hai-shan, SHI Tie-lin, LIAO Guang-lan, LIU Shi-yuan, ZHANG Wen-dong. Profilometer Based on Interferometry and Micro Vision System[J]. Opto-Electronic Engineering, 2008, 35(7): 84 Copy Citation Text

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References

[4] Akira HIRABAYASHI,Hidemitsu OGAWA,Katsuichi KITAGAWA.Fast surface profiler by white-light interferometry by use of a new algorithm based on sampling theory[J].Applied Optics,2002,41(23):4876-4883

[6] Michael B SINCLAIR,Maarten P DE BOER,Alex D CORWIN.Long-working-distance incoherent-light interference microscope[J].Applied Optics,2005,44(36):7714-7721

[7] Michael W LINDNER.White-light interferometry via an endoscope[J].SPIE,2002,4777:90-101

WANG Hai-shan, SHI Tie-lin, LIAO Guang-lan, LIU Shi-yuan, ZHANG Wen-dong. Profilometer Based on Interferometry and Micro Vision System[J]. Opto-Electronic Engineering, 2008, 35(7): 84

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