Shanshan Wang, Feng Shi, Shuo Qiao, Bowen Xu, Qun Hao, Ci Song, Guipeng Tie, Ye Tian, Dede Zhai, Xing Peng. Error-sensitive factors analysis and verification for optical element in-situ measurement device based on phase measuring deflectometry[J]. High Power Laser and Particle Beams, 2023, 35(9): 091002
- High Power Laser and Particle Beams
- Vol. 35, Issue 9, 091002 (2023)
Fig. 1. Data transmission flow chart
Fig. 2. Edge ray tracing of Zemax
Fig. 3. Different k values correspond to the measurement surface shape error
Fig. 4. The surface shape errors corresponding to different k values
Fig. 5. Schematic diagram of the influence of image generator positioning error along Z axis
Fig. 6. De-skewed surface shape error caused by the image generator offsetting 0.01 mm along the positive direction of Z axis
Fig. 7. Surface shape error caused by image generator’s offset along the Z axis direction
Fig. 8. Zernike coefficients corresponding to surface shape error
Fig. 9. Size of the surface shape error caused by the offset along the Z axis
Fig. 10. Zernike coefficients corresponding to surface shape error
Fig. 11. Schematic diagram of the change of sampling points when k 1 ＞ 0 and k 1 ＜ 0
Fig. 12. k 1＞0, slope and surface shape error caused by detector lens distortion
Fig. 13. Surface shape error caused by lens distortion of detector
Fig. 14. Zernike coefficients corresponding to surface shape error
Fig. 15. In-situ detection system structure
Fig. 16. Change of measurement results with time
Fig. 17. Measurement results of surface shape error and temperature variation with time
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Table 1. Influence of image generator’s positioning error on the measurement results
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Table 2. Effect of pinhole diaphragm positioning error on measurement results
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Table 3. Effect of detector lens distortion on measurement results
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Table 4. Effect of temperature change on measurement results
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Table 5. Detection system parameters
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