Zihan Zhou, Meng Chao, Xinxin Su, Zhuo Chen, Ruonan Liu, Shuhui Bo, Zhihua Li, Zhenlin Wu, Mingshan Zhao, Xiuyou Han. Theoretical Analysis and Experimental Investigation of Silicon-Organic Hybrid Integrated Electro-Optic Modulator with Traveling-Wave Electrodes[J]. Acta Optica Sinica, 2023, 43(23): 2313002
- Acta Optica Sinica
- Vol. 43, Issue 23, 2313002 (2023)
Fig. 1. Schematic of the silicon-organic hybrid integrated MZM
Fig. 2. Schematic diagram of the modulation region of the silicon-organic hybrid integrated electro-optical modulator. (a) Three-dimensional structure; (b) cross-section of waveguide electrode
Fig. 3. Molecular structure of chromophore
Fig. 4. Circuit model of electrode transmission line
Fig. 5. Equivalent circuit for a unit length of transmission line
Fig. 6. Frequency response of MZM with different electrode characteristic impedances
Fig. 7. Electro-optic modulation frequency response with different microwave effective refractive indexes
Fig. 8. S-parameter of modulator coplanar waveguide electrode. (a) S21; (b) S11
Fig. 9. Parameters of modulator electrode. (a) Microwave effective refractive index; (b) characteristic impedance
Fig. 10. SEM photos of waveguide grating coupler. (a) General structure; (b) partial zoom-in structure
Fig. 11. SEM photos of silicon based multimode interference coupler. (a) General structure; (b) partial zoom-in structure
Fig. 12. Silicon slot waveguide modulator chip and its optical microscope photographs
Fig. 13. Measurement results of electrical S-parameter of the modulator
Fig. 14. Electrode parameters obtained by S-parameter. (a) Microwave effective refractive index; (b) electrode characteristic impedance
Fig. 15. Electro-optical response of the modulator simulated with measured electrical S-parameter
Fig. 16. Measured electro-optic modulation response curve of silicon-organic hybrid integrated modulator
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