Study on micro bulk defects detection in MEMS components

[in Chinese]; [in Chinese]; [in Chinese]

Journals >Infrared and Laser Engineering >Volume 31 >Issue 4 >Page 351 > Article

Infrared and Laser Engineering
Vol. 31, Issue 4, 351 (2002)

Study on micro bulk defects detection in MEMS components

[in Chinese]^*, [in Chinese], and [in Chinese]

Author Affiliations

[in Chinese]

show less

DOI: Cite this Article

[in Chinese], [in Chinese], [in Chinese]. Study on micro bulk defects detection in MEMS components[J]. Infrared and Laser Engineering, 2002, 31(4): 351 Copy Citation Text

show less

References

[1] You Zheng, Cher Jun, Yang Ren. Theoretic and experimental study of micro bu k defects laser detecting base on the Mie theo ry[J]. China Laser, 1997, A24(6) :508-512.

[2] Maheu B, Gouebet G, Grehan G. A concise presentation of the generalized Lorenz-Mie theory for arbitrary location of the scat ter in an arbitrary incident profile[J]. Journal of Optics, 1988, 19:57-60.

[3] Gouebet G, Grehan G, Maheu B. Localized interpretation to compute all the coefficients gn in the generalized Lorenz-Mie the ory[J]. Journal of the Optical Society in America A, 1990, 7(6) :998-1007.

[in Chinese], [in Chinese], [in Chinese]. Study on micro bulk defects detection in MEMS components[J]. Infrared and Laser Engineering, 2002, 31(4): 351

Download Citation

Tools

Save the article for my favorites

Paper Information